Description
Properties
- Developed for high purity applications with limited space requirements. Commonly used in applications such as smaller integrated gas stick and gas box assemblies.
- The nominal sizes of 1″ and 1.3″ are ideal for applications involving gaseous, liquid, and corrosive media up to 160 psi.
- The mini diaphragm gauge is helium leak tested and the internals are electropolished to optimally meet purity standards.
- With such UHP characteristics, the mini diaphragm gauge is suitable for the semiconductor and flat panel industries, various gas distribution systems, as well as medical gas applications
- The mini diaphragm gauge complies with SEMATECH and SEMI standards to optimally ensure the quality your applications demand.