WUD-20 WUD-25 WUD-26 Ultra High Purity Transducer

Applications

  • Semiconductor, flat panel display and photovoltaic industry
  • Ultrapure gas supply in semiconductor production systems

Product features

  • High-accuracy pressure measurement 0.15 % RSS
  • Excellent long-term stability
  • Signal noise cancellation and shielding
  • Vacuum-referenced pressure measurement
  • Active temperature compensation

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Description

The WUD-2x series ultra high purity transducers combine state-of-the-art transducer concepts with analogue output signals. This creates the safest and most accurate pressure measurements necessary for today’s market requirements. Pressure measurementis based on a true vacuum reference. Electronic measures offer interference shielding and signal noise cancellation. This ensures high-accuracy pressure measurement and excellent long-term stability. Active temperature compensation reduces the impact of changing temperatures on the transducer. This allows for safe operations even in applications with high fluctuations in temperature. WUD-25 (flow through) and WUD-26 (surface mount)transducers are specifically designed to sustain torsionapplied stresses often incurred during installation. The special design of the thin-film sensor eliminates the risk of sensor failure due to loads at the process connection or welded joints.

Versatile

The WUD-2x can be readily installed in “on-tool” gas distribution systems. The bright LED display is rotatable and easy to read from any position. Application-specific monitoring and control operations can be realised via two programmable switch outputs.

Compact

With its small footprint the WUD-2x is the most compact UHP transducer in the market. Thus it is optimally suited for installation in applications with limited mounting space, and even in existing plants it can be easily retrofitted.