WU-20 WU-25 WU-26 Ultra High Purity Transducer

Applications

  • Gas panels for OEM tools
  • Semiconductor, flat panel display and photovoltaic industry
  • Special and bulk-gas supply

Product features

  • High-accuracy pressure measurement 0.15 % RSS
  • Excellent long-term stability
  • Signal noise shielding and cancellation
  • Active temperature compensation
  • ATEX and IECEx zone 2 approval FM class I div. 2 groups A, B, C & D

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Description

Reliable

The WU-2x series combines state-of-the-art digital transducer concepts with analogue-like output signals. This model offers the safest and most accurate pressure measurements necessary for today’s market requirements.

Pressure measurement is based on a true vacuum reference. Electronic measures for interference shielding and signal noise cancellation ensure high-accuracy pressure measurement and excellent long-term stability.

Active temperature compensation reduces the impact of changing temperatures on the transducer, allowing safe operations even in applications with high fluctuations in temperature, e.g. Joule-Thomson effect in the case of gas expansion.

WU-25 (flow through) and WU-26 (surface mount) trans ducers are specifically designed to sustain torsion-applied stresses often incurred during installation. The special design of the thin-film sensor eliminates the risk of sensor failure due to loads at the process connection or welded joints.

Versatile

The WU-2x transducer can be readily installed in indoor or outdoor systems as well as in non-flammable or potentially flammable areas. The hermetically sealed design of the WU-2x prevents the ingress of humidity.

Approvals for non-flammable and potentially flammable environments ensure a high level of product safety. Instruments for temperature class T6 meet the high requirements for low, spontaneous ignition temperature media (phosphine (PH3) and silane (SiH4)).

Compact

With its small footprint the WU-2x is the most compact UHP transducer in the market. Thus it is optimally suited for installation in applications with limited mounting space, and even in existing plants it can be easily retrofitted.