432.10 432.15 Mini Diaphragm Pressure Gauge

Applications

  • For gaseous and liquid, also aggressive media for demanding high purity applications, also in aggressive ambience
  • Semiconductor and flat panel industry
  • Gas distribution systems
  • Medical gases
  • Hook-up application

Product features

  • Mechanical pressure gauge with diaphragm element
  • Compact design for minimal dead volume and reduced particle generation and entrapment
  • Helium leak tested, leak rate ≤ 10-9 mbar · l/s
  • Electropolished wetted parts, surfaces with Ra < 0.25 μm (Ra < 10 μin) for diaphragm element and measuring chamber
  • Process connector components from electropolished 316L with metal sealing disc, orbital welded to measuring chamber

Downloads

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Description

Properties

  • Developed for high purity applications with limited space requirements. Commonly used in applications such as smaller integrated gas stick and gas box assemblies.
  • The nominal sizes of 1″ and 1.3″ are ideal for applications involving gaseous, liquid, and corrosive media up to 160 psi.
  • The mini diaphragm gauge is helium leak tested and the internals are electropolished to optimally meet purity standards.
  • With such UHP characteristics, the mini diaphragm gauge is suitable for the semiconductor and flat panel industries, various gas distribution systems, as well as medical gas applications
  • The mini diaphragm gauge complies with SEMATECH and SEMI standards to optimally ensure the quality your applications demand.